Browsing by author "Poon, T."
Now showing items 1-3 of 3
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Basic aspects of the formation and activation of boron junctions using plasma immersion ion implantation
Zschaetzsch, Gerd; Vandervorst, Wilfried; Hoffmann, Thomas; Goossens, Jozefien; Everaert, Jean-Luc; del Agua Borniquel, Jose Ignacio; Poon, T. (2008) -
Conformal doping of FINFET's: a fabrication and metrology challenge
Vandervorst, Wilfried; Everaert, Jean-Luc; Rosseel, Erik; Jurczak, Gosia; Hoffmann, Thomas; Eyben, Pierre; Mody, Jay; Zschaetzsch, Gerd; Koelling, Sebastian; Gilbert, Matthieu; Poon, T.; del Agua Borniquel, Jose Ignacio; Foad, M.; Duffy, Ray; Pawlak, Bartek (2008) -
Probing doping conformality in fin shaped field effect transistor structures using resistors
Vandervorst, Wilfried; Jurczak, Gosia; Everaert, Jean-Luc; Pawlak, B.J.; Duffy, Ray; Del-Agua-Bomiquel, J.I.; Poon, T. (2008)