Browsing by author "Schreel, Koen"
Now showing items 1-7 of 7
-
Experimental study of effect of pellicle on optical proximity fingerprint for 1.35 NA immersion ArF lithography
Van Look, Lieve; Bekaert, Joost; Laenens, Bart; Vandenberghe, Geert; Richter, Jan; Bubke, Karsten; Peters, Jan Hendrik; Schreel, Koen; Dusa, Mircea (2010) -
Experimental verification of source-mask optimization and freeform illumination for 22 nm node SRAM cells
Bekaert, Joost; Laenens, Bart; Verhaegen, Staf; Van Look, Lieve; Trivkovic, Darko; Lazzarino, Frederic; Vandenberghe, Geert; Van Adrichem, Paul; Socha, Robert; Hsu, Stephen; Liu, Hua Yu; Mouraille, Orion; Schreel, Koen; Dusa, Mircea; Zimmermann, Joerg; Gräupner, Paul; Neumann, Jens Timo (2011-03) -
Freeform illumination sources: Source mask optimization for 22 nm node SRAM
Bekaert, Joost; Laenens, Bart; Verhaegen, Staf; Van Look, Lieve; Trivkovic, Darko; Lazzarino, Frederic; Vandenberghe, Geert; Van Adrichem, Paul; Socha, Robert; Mulder, M.; Baron, Stanislas; Tsai, Min-Chun; Ning, Kai; Hsu, Stephen; Bouma, A.; van der Heijden, E.; Schreel, Koen; Carpaij, R.; Dusa, Mircea; Zimmerman, Joerg; Graeupner, Paul; Hennerkes, Christoph (2009) -
Optical proximity stability control of ArF immersion clusters
Van Look, Lieve; Bekaert, Joost; D'have, Koen; Laenens, Bart; Vandenberghe, Geert; Cheng, Shaunee; Schreel, Koen; Gemmink, Jan-Willem (2011) -
Pellicle contribution to optical proximity and critical dimension uniformity for 1.35 numerical aperture immersion ArF lithography
Van Look, Lieve; Bekaert, Joost; Laenens, Bart; Vandenberghe, Geert; Richter, Jan; Bubke, Karsten; Peters, Jan Hendrik; Schreel, Koen; Dusa, Mircea (2011-03) -
Scanner matching for standard and freeform illumination shapes using FlexRay
Bekaert, Joost; Van Look, Lieve; D'have, Koen; Laenens, Bart; Vandenberghe, Geert; Van Adrichem, Paul; Shao, Wenjin; Ghan, J.; Schreel, Koen; Neumann, Jens Timo (2011) -
Tool-to-tool optical proximity effect matching
Van Look, Lieve; Bekaert, Joost; De Bisschop, Peter; Van de Kerkhove, Jeroen; Vandenberghe, Geert; Schreel, Koen; Menger, Jasper; Schiffelers, Guido; Knols, Edwin; Willekers, Rob (2008)