Browsing by author "Juncker, Aurelie"
Now showing items 1-4 of 4
-
A million wafer, virtual fabrication approach to determine process capability requirements for an industry-standard 5nm BEOL two-level metal flow
Clark, William; Juncker, Aurelie; Paladugu, E.; Fried, David; Wilson, Chris; Pourtois, Geoffrey; Gallagher, Emily; de Jamblinne de Meux, Albert; Piumi, Daniele; Boemmels, Juergen; Tokei, Zsolt; Mocuta, Dan (2016) -
Self-aligned block and fully self-aligned via for iN5 metal 2 self-aligned quadruple patterning
Vincent, Benjamin; Franke, Joern-Holger; Juncker, Aurelie; Lazzarino, Frederic; Murdoch, Gayle; Halder, Sandip; Ervin, Joseph (2018) -
Self-aligned block and fully self-aligned via for iN5 Metal 2 Self-aligned quadruple patterning
Vincent, Benjamin; Franke, Joern-Holger; Juncker, Aurelie; Lazzarino, Frederic; Murdoch, Gayle; Halder, Sandip; Ervin, Joseph (2018) -
Toward sub-20nm pitch Fin patterning and integration with DSA
Sayan, Safak; Marzook, Taisir; Chan, BT; Vandenbroeck, Nadia; Singh, Arjun; Laidler, David; Altamirano Sanchez, Efrain; Leray, Philippe; Rincon Delgadillo, Paulina; Gronheid, Roel; Vandenberghe, Geert; Clark, William; Juncker, Aurelie (2016)