Browsing by author "Sah, Kaushik"
Now showing items 1-10 of 10
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Connected component analysis of review-SEM images for sub-10nm node process verification
Halder, Sandip; Leray, Philippe; Sah, Kaushik; Cross, Andrew; Parisi, Paolo (2017) -
Defect characterization of EUV Self-Aligned Litho-Etch Litho-Etch (SALELE) patterning scheme for advanced nodes
Sah, Kaushik; Cross, Andrew; Das, Sayantan; Blanco, Victor; Kljucar, Luka; Halder, Sandip; Leray, Philippe (2021) -
DSA materials contributions to the defectivity performance of the 14nm half-pitch LiNe flow @ imec
Pathangi Sriraman, Hari; Vaid, Varun; Chan, BT; Vandenbroeck, Nadia; Li, Jin; Hong, Sung Eun; Cao, Yi; Durairaj, Baskaran; Lin, Guanyang; Somervell, Mark; Kitano, Takahiro; Harukawa, Ryota; Sah, Kaushik; Cross, Andrew; Bayana, Hareen; D'Urzo, Lucia; Gronheid, Roel (2016) -
EUV reticle print verification with advanced broadband optical wafer inspection and e-beam review systems
De Simone, Danilo; Sanapala, Ravikumar; Andrrew, Cross; Preil, Moshe; Qian, Jin; Sumar, Shishir; Anantha, Vidyasagar; Sah, Kaushik; Eitapence, Scott; Van Den Heuvel, Dieter; Foubert, Philippe (2017) -
EUV stochastic defect monitoring with advanced broadband optical wafer inspection and e-beam review systems
Sah, Kaushik; Cross, Andrew; Plihal, Martin; Anantha, Vidyasagar; Babulnath, Raghav; Fung, Derek; De Bisschop, Peter; Halder, Sandip (2018) -
In-device high resolution and high throughput optical metrology for process development and monitoring
Sah, Kaushik; Li, Shifang; Das, Sayantan; Halder, Sandip; Cross, Andrew (2020) -
Inspection challenges for triple patterning at sub-14 nm nodes with broadband plasma inspection platforms
Halder, Sandip; Truffert, Vincent; Van Den Heuvel, Dieter; Leray, Philippe; Cheng, Shaunee; McIntyre, Greg; Sah, Kaushik; Brown, Jim; Parisi, Paolo; Polli, Marco (2015) -
Massive metrology for process development and monitoring applications
Sah, Kaushik; Das, Sayantan; Li, S.; Beral, C.; Cross, A.; Halder, Sandip (2020) -
Process window discovery, expansion and control of design hotspots susceptible to overlay failures
Sah, Kaushik; Cross, Andrew; Mani, Antonio; Van Den Heuvel, Dieter; Foubert, Philippe (2017) -
stochastic defect monitoring with advanced broadband optical wafer inspection and e-Beam review systems
Sah, Kaushik; Cross, Andrew; Plihal, Martin; Anantha, Vidyasugar; Fung, Derek; De Bisschop, Peter; Halder, Sandip (2018)