Browsing by author "Parisi, Paolo"
Now showing items 1-5 of 5
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Connected component analysis of review-SEM images for sub-10nm node process verification
Halder, Sandip; Leray, Philippe; Sah, Kaushik; Cross, Andrew; Parisi, Paolo (2017) -
Inspection challenges for triple patterning at sub-14 nm nodes with broadband plasma inspection platforms
Halder, Sandip; Truffert, Vincent; Van Den Heuvel, Dieter; Leray, Philippe; Cheng, Shaunee; McIntyre, Greg; Sah, Kaushik; Brown, Jim; Parisi, Paolo; Polli, Marco (2015) -
Investigation of the performance of state-of-the-art defect inspection tools within EUV lithography
Van Den Heuvel, Dieter; Jonckheere, Rik; Cheng, Shaunee; Marcuccilli, Gino; Cross, Andrew; Inderhees, Greg; Parisi, Paolo (2012) -
Process window discovery methodology development for advanced lithography
Van Den Heuvel, Dieter; Foubert, Philippe; Baudemprez, Bart; Lee, Angelica; Cross, Andrew; Sao, Kaushik; Haque, Naoshin; Parisi, Paolo; Baris, Oksin (2016) -
The use of eDR-71xx for DSA defect review and automated classification
Pathangi Sriraman, Hari; Van Den Heuvel, Dieter; Bayana, Hareen; Bouckou, Loemba; Brown, Jim; Parisi, Paolo; Gosain, Rohan (2015)