Browsing by author "Rakhimova, T"
Now showing items 1-4 of 4
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Calculation of dielectric constant of porous SiCOH low-k films
Palov, A.; Rakhimova, T; Krishtab, Mikhail; Baklanov, Mikhaïl (2015) -
Dependence of electric potential at trench surfaces on ion angula distribution in plasma etching processes
Palov, A; Mankelevich, Y; Rakhimova, T; Baklanov, Mikhaïl (2016) -
Effect of porosity and pore size on dielectric constant of organosilicate based low-k films : an analytical approach
Palov, A; Voronina, E; Rakhimova, T; Lopaev, D; Zyryanov, Sergey M.; Mankelevich, Yu; Krishtab, Mikhail; Baklanov, Mikhaïl (2016) -
Effect of VUV photons on low-k OSG damage and etching by F atoms at the lowered temperature
Lopaev, D; Rakhimova, T; Mankelevich, Y; Kurchikov, K.; Zyryanov, S.; Zotovich, A.; Baklanov, Mikhaïl (2015)