Browsing by author "Leunissen, Leonardus"
Now showing items 1-6 of 6
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An improved CMP process for integration of high mobility channel materials
Teugels, Lieve; Ong, Patrick; Usman Ibrahim, Ansar; Delande, Tinne; Bhonsle, Rithu; Siebert, Max; Garcia Romero, Ivan; Struyf, Herbert; Leunissen, Leonardus (2016) -
An improved CMP process for integration of high mobility channel materials
Teugels, Lieve; Ong, Patrick; Ansar, Sheik; Delande, Tinne; Bhonsle, Rithu; Siebert, Max; Garcia Romero, Ivan; Struyf, Herbert; Leunissen, Leonardus (2016) -
Improving defectivity for III-V CMP processes for < 10 NM technology nodes
Teugels, Lieve; Ong, Patrick; Waldron, Niamh; Boccardi, Guillaume; Usman Ibrahim, Ansar; Siebert, Max; Leunissen, Leonardus (2014) -
Inspection, characterization and classification of defects for improved CMP of III-V materials
Bhonsle, Rithu; Teugels, Lieve; Usman Ibrahim, Ansar; Ong, Patrick; Delande, Tinne; Krishnan, S; Siebert, Max; Struyf, Herbert; Leunissen, Leonardus (2015) -
Inspection, characterization and classification of defects for improved CMP of III-V materials
Bhonsle, Rithu; Teugels, Lieve; Usman Ibrahim, Ansar; Ong, Patrick; Delande, Tinne; Krishnan, Sitaraman; Siebert, Max; Struyf, Herbert; Leunissen, Leonardus (2015) -
Updates on Ge AND SiGe CMP processes for integration as high mobility channel materials
Ong, Patrick; Teugels, Lieve; Ansar, Sheikh; Delande, Tinne; Bhonsle, Rithu; Siebert, Max; Leunissen, Leonardus (2015)