Browsing by author "Ervin, Joe"
Now showing items 1-3 of 3
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N7 FinFET self-aligned quadruple patterning modeling
Baudot, Sylvain; Guissi, Sofiane; Milenin, Alexey; Ervin, Joe; Schram, Tom (2018) -
Self-aligned fin cut last patterning scheme for fin arrays of 24nm pitch and beyond
Baudot, Sylvain; Soussou, Assawer; Milenin, Alexey; Ervin, Joe; Demuynck, Steven (2018) -
Self-aligned fin cut last patterning scheme for fin arrays of 24nm pitch and beyond
Baudot, Sylvain; Soussou, Assawer; Milenin, Alexey; Hopf, Toby; Wang, Shouhua; Weckx, Pieter; Vincent, Benjamin; Ervin, Joe; Demuynck, Steven (2019)