Browsing by author "Voloshin, D.G."

Now showing items 1-3 of 3

Low-k films modification under EUV and VUV radiation

Rakhimova, T.; Rakhimov, A.; Mankelevich, Y.A.; Lopaev, D.V.; Kovalev, A.S.; Vasil'eva, A.N.; Zyryanov, S.M.; Kurchikov, K.; Proshina, O.; Voloshin, D.G.; Novikova, N.N.; Krishtab, Mikhail; Baklanov, Mikhaïl (2014)
Recombination of O and H atoms with low-k SiOCH films pretreated in He plasma

Baklanov, Mikhaïl; Braginsky, O.V.; Kovalev, A.S.; Lopaev, D.V.; Mankelevich, Y.A.; Rakhimova, T.V.; Malykhin, E.M.; Proshina, O.V.; Rakhimov, A.T.; Vasilieva, A.N.; Voloshin, D.G.; Zyryanov, S.M. (2009)
The effect of He plasma treatment on properties of organosilicate glass low-k films

Braginsky, O.V.; Kovalev, A.S.; Lopaev, D.V.; Malykhin, E.M.; Mankelevich, Y.A.; Proshina, O.V.; Rakhimova, T.V.; Rakhimov, A.T.; Voloshin, D.G.; Vasilieva, A.N.; Zyryanov, S.M.; Smirnov, Evgeny; Baklanov, Mikhaïl (2011)