Authors

Baklanov, Mikhaïl; Braginsky, O.V.; Kovalev, A.S.; Lopaev, D.V.; Mankelevich, Y.A.; Rakhimova, T.V.; Malykhin, E.M.; Proshina, O.V.; Rakhimov, A.T.; Vasilieva, A.N.; Voloshin, D.G.; Zyryanov, S.M.

Conference

Materials, Processes and Reliability for Advanced Interconnects for Micro- and Nanoelectronics

Title

Recombination of O and H atoms with low-k SiOCH films pretreated in He plasma

Publication type

Proceedings paper