Publication:

Recombination of O and H atoms with low-k SiOCH films pretreated in He plasma

Date

2009

Proceedings Paper

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Author(s)

Baklanov, Mikhaïl

;

Braginsky, O.V.

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;

;

Mankelevich, Y.A.

;

Rakhimova, T.V.

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;

;

;

Vasilieva, A.N.

;

;

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1947 since deposited on 2021-10-17

Acq. date: 2026-04-26