Recombination of O and H atoms with low-k SiOCH films pretreated in He plasma

Publication:

2009

Proceedings Paper

Author(s)

Baklanov, Mikhaïl

;

Braginsky, O.V.

;

Kovalev, A.S.

;

Lopaev, D.V.

;

Mankelevich, Y.A.

;

Rakhimova, T.V.

;

Malykhin, E.M.

;

Proshina, O.V.

;

Rakhimov, A.T.

;

Vasilieva, A.N.

;

Voloshin, D.G.

;

Zyryanov, S.M.

1945 since deposited on 2021-10-17

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Acq. date: 2026-01-25