The effect of He plasma treatment on properties of organosilicate glass low-k films

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Authors

Braginsky, O.V.; Kovalev, A.S.; Lopaev, D.V.; Malykhin, E.M.; Mankelevich, Y.A.; Proshina, O.V.; Rakhimova, T.V.; Rakhimov, A.T.; Voloshin, D.G.; Vasilieva, A.N.; Zyryanov, S.M.; Smirnov, Evgeny; Baklanov, Mikhaïl

ISSN

0021-8979

Issue

4

Journal

Journal of Applied Physics

Volume

109

Title

The effect of He plasma treatment on properties of organosilicate glass low-k films

Publication type

Journal article

Embargo date

9999-12-31

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