Publication:

The effect of He plasma treatment on properties of organosilicate glass low-k films

Date

2011
Journal article
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Author(s)

Braginsky, O.V.
;
Kovalev, A.S.
;
Lopaev, D.V.
;
Malykhin, E.M.
;
Mankelevich, Y.A.
;
Proshina, O.V.
;
Rakhimova, T.V.
;
Rakhimov, A.T.
;
Voloshin, D.G.
;
Vasilieva, A.N.
;
Zyryanov, S.M.
;
Smirnov, Evgeny
;
Baklanov, Mikhaïl

Journal

Journal of Applied Physics

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