Browsing by author "Knaepen, Werner"
Now showing items 1-7 of 7
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AlON gate dielectric and gate trench cleaning for improved relia-bility of vertical GaN MOSFET
Filho Goncalez, Walter; Borga, Matteo; Geens, Karen; Cingu, Deepthi; Chatterjee, Urmimala; You, Shuzhen; Bakeroot, Benoit; Decoutere, Stefaan; Knaepen, Werner; Arnou, Panagiota; Homm, Pia (2022) -
Crystallization resistance of barium titanate zirconate ultrathin films from aqueousCSD: a study of cause and effect
Hardy, An; Van Elshocht, Sven; Knaepen, Werner; D'Haen, Jan; Conard, Thierry; Brijs, Bert; Vandervorst, Wilfried; Pourtois, Geoffrey; Kittl, Jorge; Detavernier, Christophe; Heyns, Marc; Van Bael, Marlies; Van den Rul, Heidi; Mullens, Jules (2009) -
Impact of sequential infiltration synthesis on pattern fidelity of DSA lines
Singh, Arjun; Knaepen, Werner; Sayan, Safak; El Otell, Ziad; Chan, BT; Maes, Jan; Gronheid, Roel (2015) -
Improved cost-effectiveness of the block co-polymer anneal process for DSA
Pathangi Sriraman, Hari; Stokhof, Maarten; Knaepen, Werner; Vaid, Varun; Mallik, Arindam; Chan, BT; Vandenbroeck, Nadia; Maes, Jan; Gronheid, Roel (2016) -
Integration of the Sequential Infiltration Synthesis (SIS) on Polyphtaladehyde (PPA) resist for thermal Scanning Probe Lithography (t-SPL) patterning
Chan, BT; de Marneffe, Jean-Francois; Spieser, Martin; Knoll, Armin; Knaepen, Werner (2017) -
Sequential infiltration synthesis for line edge roughness mitigation of EUV resist
Baryshnikova, Marina; De Simone, Danilo; Knaepen, Werner; Kachel, Krzysztof; Chan, BT; Paolillo, Sara; Maes, Jan; De Roest, David; Rincon Delgadillo, Paulina; Vandenberghe, Geert (2017) -
Sequential infiltration synthesis for line edge roughness mitigation of EUV resist
Baryshnikova, Marina; De Simone, Danilo; Chan, BT; Rincon Delgadillo, Paulina; Vandenberghe, Geert; Kachel, Krzysztof; Knaepen, Werner; Maes, Jan; De Roest, David (2017)