Browsing by author "Grenville, Andrew"
Now showing items 1-5 of 5
-
Demonstration of an N7 integrated fab process for metal oxide EUV photoresist
De Simone, Danilo; Mao, Ming; Kocsis, Michael; De Schepper, Peter; Lazzarino, Frederic; Vandenberghe, Geert; Yamashita, Fumiko; Stowers, Jason; Meyers, Steven; Grenville, Andrew; Luong, Vinh; Parnell, Doni; Clark, Benjamin L. (2016) -
Experimental measurements of diffraction for periodic patterns by 193-nm polarized radiation compared to rigorous EMF simulations
Bennett, Marylyn Hoy; Grenville, Andrew; Hector, Scott; Palmer, Shane; Leunissen, Peter; Philipsen, Vicky; Bloomstein, Theodore; Hardy, Denis E.; Rothschild, Mordechai; Hilfiker, James N. (2005) -
Initial assessment of the impact of the use of a hard pellicle on imaging
De Bisschop, Peter; Bruls, Richard; Cicilia, Orlando; Uitterdijk, Tammo; Grenville, Andrew; Kocsis, Michael; Van Peski, Chris (2003) -
Integrated fab process for metal oxide EUV photoresist
Grenville, Andrew; Anderson, Jeremy T.; Clark, Benjamin L.; De Schepper, Peter; Edson, Joseph; Greer, Michael; Kai, Jiang; Kocsis, Michael; Meyers, Stephen T.; Stowers, Jason K.; Telecky, Alan J.; De Simone, Danilo; Vandenberghe, Geert (2015) -
Metal oxide EUV photoresist performance for N7 relevant patterns and processes
Stowers, Jason; Anderson, Jeremy; Cardineau, Brian; Clark, Benjamin; De Schepper, Peter; Edson, Joseph; Greer, Michael; Jiang, Kai; Kocsis, Michael; Meyers, Stephen; Telecky, Alan; Grenville, Andrew; De Simone, Danilo; Gillijns, Werner; Vandenberghe, Geert (2016)