Browsing by author "Alaerts, Carine"
Now showing items 1-7 of 7
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Damascene integration feasability of porous SiLK resin films
Waeterloos, Joost; Struyf, Herbert; Van Aelst, Joke; Das, Arabinda; Caluwaerts, Rudy; Alaerts, Carine; Boullart, Werner; Tokei, Zsolt; Van Hove, Marleen; Maex, Karen (2002) -
Dry etch and clean aspects for advanced integration of low k dielectrics
Vanhaelemeersch, Serge; Struyf, Herbert; Alaerts, Carine; Baklanov, Mikhaïl; Lepage, Muriel (2000) -
Dry etching of low-K materials
Vanhaelemeersch, Serge; Alaerts, Carine; Baklanov, Mikhaïl; Struyf, Herbert (1999) -
Integration feasibility of porous SiLK semiconductor dielectric
Waeterloos, Joost; Struyf, Herbert; Van Aelst, Joke; Castillo, D. W.; Lucero, S.; Caluwaerts, Rudy; Alaerts, Carine; Mannaert, Geert; Boullart, Werner; Sleeckx, Erik; Schaekers, Marc; Tokei, Zsolt; Vervoort, Iwan; Steenbergen, Johnny; Sijmus, Bram; Vos, I.; Meuris, Marc; Iacopi, Francesca; Donaton, R (2001) -
Plasma etching of organic low-dielectric-constant polymers: comparative analysis
Baklanov, Mikhaïl; Vanhaelemeersch, Serge; Alaerts, Carine; Maex, Karen (1998) -
Post dry-etch cleaning issues of an organic low-K dielectric
Lanckmans, Filip; Baklanov, Mikhaïl; Alaerts, Carine; Vanhaelemeersch, Serge; Maex, Karen (1998) -
Post dry-etch cleaning issues of an organic low-K dielectric
Lanckmans, Filip; Baklanov, Mikhaïl; Alaerts, Carine; Vanhaelemeersch, Serge; Maex, Karen (1999)