Browsing by author "Collart, E. J. H."
Now showing items 1-3 of 3
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Cluster formation during annealing of ultra-low-energy boron-implanted silicon
Collart, E. J. H.; Murrell, A. J.; Foad, M. A.; van den Berg, J. A.; Zhang, S.; Armour, D.; Goldberg, R. D.; Wang, T. S.; Cullis, A. G.; Clarysse, Trudo; Vandervorst, Wilfried (2000) -
Electrical characterization of ultra shallow dopant profiles
Clarysse, Trudo; Vandervorst, Wilfried; Collart, E. J. H.; Murell, A. J. (1999) -
Electrical characterization of ultrashallow dopant profiles
Clarysse, Trudo; Vandervorst, Wilfried; Collart, E. J. H.; Murrell, A. J. (2000)