Browsing by author "Schmolke, R."
Now showing items 1-8 of 8
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Bulk micro defects of p/p epitaxial silicon wafers with nitrogen doped substrates and their gettering behavior
Schmolke, R.; Blietz, M.; Hölzl, R.; Menzel, D.; Bender, Hugo (2002) -
Characterization of interstitial related defects in p-silicon substrates by homoepitaxial
Schmolke, R.; Angelberger, W.; von Ammon, W.; Bender, Hugo (2001) -
Fabrication and characterization of artificial crystal originated particles
Bearda, Twan; Mertens, Paul; Heyns, Marc; Schmolke, R. (1999) -
High resolution structure imaging of octohedral void defects
Bender, Hugo; Vanhellemont, Jan; Schmolke, R. (1997) -
Impact of hydrogen on oxygen precipitation and gate oxide integrity after RTA processing
Möller, T.; Obermeier, G.; Bearda, Twan; Huber, A.; Schmolke, R.; von Ammon, W.; Lerch, W. (2001) -
Modelling of crystal originated particles and their impact on gate oxide integrity
Bearda, Twan; Mertens, Paul; Woerlee, P. H.; Wallinga, H.; Schmolke, R.; Heyns, Marc (2002) -
Morphology change of artificial crystal originated particles
Bearda, Twan; Mertens, Paul; Heyns, Marc; Schmolke, R. (2000) -
Process inspection by laser beam scanning of unpatterned wafers
Mertens, Paul; Devriendt, Katia; Zeng, Andrew; Fyen, Wim; Bearda, Twan; Vos, Rita; Kenis, Karine; Arnauts, Sophia; Schmolke, R.; Wagner, P.; Heyns, Marc (2000)