Browsing by author "Detlefs, Blanka"
Now showing items 1-5 of 5
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Characterization of high-k nanolayers by grazing incidence X-ray spectrometry
Müller, Matthias; Hönicke, Philipp; Detlefs, Blanka; Fleischmann, Claudia (2014) -
Quantification of high-K nanolayers for semiconductor applications using synchrotron radiation and calibrated instrumentation
Mueller, Matthias; Hoenicke, Philipp; Detlefs, Blanka; Fleischmann, Claudia; Vandervorst, Wilfried; Beckhoff, Burkhard (2014) -
Reference-free, depth dependent characterization of nanoscale materials by combined X-ray reflectivity and grazing incidence X-ray fluorescence analysis
Hoenicke, Philipp; Mueller, Matthias; Detlefs, Blanka; Fleischmann, Claudia; Beckhoff, Burkhard (2014) -
Reference-free, depth-dependent characterization of nanoscaled materials using a combined grazing incidence X-ray fluorescence and X-ray reflectometry approach
Hoenicke, Philipp; Detlefs, Blanka; Fleischmann, Claudia; Vandervorst, Wilfried; Mueller, Matthias; Nolot, Emmanuel; Grampeix, Helen; Beckhoff, Burkhard (2015) -
Reference-free, in-depth characterization of nanoscaled systems with advanced grazing incidence X-ray fluorescence analysis
Hoenicke, Philipp; Mueller, Matthias; Detlefs, Blanka; Fleischmann, Claudia; Beckhoff, Burkhard (2014)