Characterization of high-k nanolayers by grazing incidence X-ray spectrometry

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Authors

Müller, Matthias; Hönicke, Philipp; Detlefs, Blanka; Fleischmann, Claudia

ISSN

1996-1944

Issue

4

Journal

Materials

Volume

7

Title

Characterization of high-k nanolayers by grazing incidence X-ray spectrometry

Publication type

Journal article

Embargo date

9999-12-31

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