Browsing by author "Besser, Paul"
Now showing items 1-7 of 7
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Airgaps in advanced nano-interconnects; mechanics and impact on electromigration
Zahedmanesh, Houman; Besser, Paul; Wilson, Chris; Croes, Kristof (2016) -
Comparative study of Ni-silicide and Co-silicide for sub 0.25 μm technologies
Lauwers, A.; Besser, Paul; Gutt, T.; Satta, Alessandra; de Potter de ten Broeck, Muriel; Lindsay, Richard; Roelandts, Nico; Loosen, Fred; Stucchi, Michele; Vrancken, Christa; Deweerdt, Bruno; Maex, Karen (1999) -
Comparative study of Ni-silicide and Co-silicide for sub 0.25-μm technologies
Lauwers, A.; Besser, Paul; Gutt, T.; Satta, Alessandra; de Potter de ten Broeck, Muriel; Lindsay, Richard; Roelandts, Nico; Loosen, Fred; Jin, S.; Bender, Hugo; Stucchi, Michele; Vrancken, Evi; Deweerdt, Bruno; Maex, Karen (2000) -
Control and impact of processing ambient during rapid thermal silicidation
Maex, Karen; Kondoh, Eiichi; Lauwers, Anne; Steegen, An; de Potter de ten Broeck, Muriel; Besser, Paul; Proost, Joris (1998) -
Performance and manufacturability of the Co/Ti (cap) silicidation process for 0.25μm MOS technologies
Lauwers, Anne; Besser, Paul; de Potter de ten Broeck, Muriel; Kondoh, Eiichi; Roelandts, Nico; Steegen, An; Stucchi, Michele; Maex, Karen (1998) -
Self-aligned CoSi2 for 0.18mm and below
Maex, Karen; Lauwers, A.; Besser, Paul; Kondoh, Eiichi; de Potter de ten Broeck, Muriel; Steegen, An (1999) -
The influence of capping layer type on cobalt salicide formation in films and narrow lines
Besser, Paul; Lauwers, Anne; Roelandts, Nico; Maex, Karen; Blum, W.; Alvis, R.; Stucchi, Michele; de Potter de ten Broeck, Muriel (1998)