Authors

Lauwers, Anne; Besser, Paul; de Potter de ten Broeck, Muriel; Kondoh, Eiichi; Roelandts, Nico; Steegen, An; Stucchi, Michele; Maex, Karen

Conference

Proceedings of the IEEE 1998 International Interconnect Technology Conference - IITC

Title

Performance and manufacturability of the Co/Ti (cap) silicidation process for 0.25μm MOS technologies

Publication type

Proceedings paper

Embargo date

9999-12-31