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Performance and manufacturability of the Co/Ti (cap) silicidation process for 0.25μm MOS technologies
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1 since deposited on 2021-09-30
Acq. date: 2025-12-08
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1948 since deposited on 2021-09-30
Acq. date: 2025-12-08
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1 since deposited on 2021-09-30
Acq. date: 2025-12-08
Views
1948 since deposited on 2021-09-30
Acq. date: 2025-12-08
Citations