Publication:

Performance and manufacturability of the Co/Ti (cap) silicidation process for 0.25μm MOS technologies

Date

1998
Proceedings Paper
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Author(s)

Lauwers, Anne  
;
Besser, Paul  
;
de Potter de ten Broeck, Muriel  
;
Kondoh, Eiichi
;
Roelandts, Nico
;
Steegen, An
;
Stucchi, Michele  
;
Maex, Karen  

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1947 since deposited on 2021-09-30
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