Browsing by author "Bertrand, P."
Now showing items 1-6 of 6
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Advanced characterisation : an indispensable tool for ultra clean processing
Vandervorst, Wilfried; Bender, Hugo; Storm, Wolfgang; Heyns, Marc; Polleunis, C.; Bertrand, P. (1995) -
Combining TOF-SIMS with XPS to quantify organic surface coverages
Kenens, Conny; Conard, Thierry; Hellemans, L.; Bertrand, P.; Vandervorst, Wilfried (2000) -
Degradation of clean Si-surfaces due to storage in clean (?) wafer boxes
Storm, Wolfgang; Vandervorst, Wilfried; Alay, Josep Lluis; Meuris, Marc; Opdebeeck, Ann; Heyns, Marc; Polleunis, C.; Bertrand, P. (1994) -
Influence of electromagnetic interferences on the mass sensitivity of surface acoustic wave sensors
Francis, Laurent; Friedt, Jean-Michel; De Palma, Randy; Bertrand, P.; Campitelli, Andrew (2004) -
Just-Clean- Enough technology for the 21st century
Heyns, Marc; Meuris, Marc; Mertens, Paul; Hurd, Trace; Schmidt, Harald; Depas, Michel; Rotondaro, Antonio; Vermeire, Bert; Vandervorst, Wilfried; Storm, Wolfgang; Polleunis, C.; Bertrand, P.; McGeary, M. J.; Lubbers, A.; Hatcher, Z. (1995) -
ToF-SIMS and XPS characterization of plasma etch residues on cobalt silicide surfaces
Storm, Wolfgang; Vandervorst, Wilfried; Vanhaelemeersch, Serge; Baklanov, Mikhaïl; Maex, Karen; Poleunis, C.; Bertrand, P. (1997)