Browsing by author "Huang, Yan-Hua"
Now showing items 1-4 of 4
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Epitaxial SiGe:B for advanced p-MOS contacts: low contact resistivities achieved by optimizing strain in SiGe and thermal treatments applied to contacts
Huang, Yan-Hua; Porret, Clément; Hikavyy, Andriy; Rengo, Gianluca; Yu, Hao; Schaekers, Marc; Everaert, Jean-Luc; Heyns, Marc; Loo, Roger (2019) -
Improving the electrical properties of epitaxial SiGe:B with excimer laser annealing treatments
Huang, Yan-Hua; Porret, Clément; Hikavyy, Andriy; Rengo, Gianluca; Petersen Barbosa Lima, Lucas; Khazaka, Rami; Kohen, David; Margetis, Joe; Tolle, John; Mazzamuto, Fulvio; Tabata, Toshiyuki; Heyns, Marc; Loo, Roger (2019) -
Selective epitaxial p-SiGe source-drain contacts: low contact resistivity (1.5x10-9 ohm.cm2) by optimizing strain and doping concentration
Porret, Clément; Huang, Yan-Hua; Rengo, Gianluca; Yu, Hao; Schaekers, Marc; Everaert, Jean-Luc; Heyns, Marc; Vohra, Anurag; Hikavyy, Andriy; Rosseel, Erik; Langer, Robert; Loo, Roger (2019) -
Very low temperature epitaxy of group-IV semiconductors for use in FinFET, stacked nanowires and monolithic 3D integration
Porret, Clément; Vohra, Anurag; Hikavyy, Andriy; Rosseel, Erik; Huang, Yan-Hua; Tirrito, Matteo; Kohen, David; Margetis, Joe; Tolle, John; Petersen Barbosa Lima, Lucas; Khazaka, Rami; Langer, Robert; Loo, Roger (2019)