Authors

Huang, Yan-Hua; Porret, Clément; Hikavyy, Andriy; Rengo, Gianluca; Yu, Hao; Schaekers, Marc; Everaert, Jean-Luc; Heyns, Marc; Loo, Roger

Conference

2019 EMRS fall meeting

Title

Epitaxial SiGe:B for advanced p-MOS contacts: low contact resistivities achieved by optimizing strain in SiGe and thermal treatments applied to contacts

Publication type

Meeting abstract