Browsing by author "Schaekers, Marc"
Now showing items 1-20 of 197
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0.13µm CMOS technology with optimized poly-Si / NO-oxide gate stack
Kubicek, Stefan; Jansen, Philippe; Badenes, Gonçal; Schaekers, Marc; Kol'dyaev, Victor; Deferm, Ludo; De Meyer, Kristin; Kerr, Daniel; Naem, Abdalla (1999) -
1.5×10-9 Ω·cm² Contact Resistivity on Highly Doped Si:P Using Ge Pre-amorphization and Ti Silicidation
Yu, Hao; Schaekers, Marc; Rosseel, Erik; Peter, Antony; Lee, Joon-Gon; Song, Woo-Bin; Demuynck, Steven; Chiarella, Thomas; Ragnarsson, Lars-Ake; Kubicek, Stefan; Everaert, Jean-Luc; Horiguchi, Naoto; Barla, Kathy; Kim, Daeyong; Collaert, Nadine; Thean, Aaron; De Meyer, Kristin (2015) -
A conformal oxide liner for through silicon vias by pulsed SA-CVD deposition
Sleeckx, Erik; Schaekers, Marc; Durr, Emma (2009) -
A conformal oxide liner for through silicon vias by pulsed SA-CVD deposition
Sleeckx, Erik; Schaekers, Marc; Durr, Emma (2009) -
A low thermal budget pre metal dielectric stack using PECVD and HDP processing
Schaekers, Marc; De Jaeger, Brice; Sleeckx, Erik; Debusschere, Ingrid; Van Hove, Marleen; Lauwers, A.; Hauf, H. (2001) -
A novel approach to characterise a low-k dielectric polymer surface
Martin Hoyas, Ana; Schuhmacher, Jorg; Le, Quoc Toan; Whelan, Caroline; Schaekers, Marc; Celis, Jean-Pierre; Maex, Karen (2002) -
A novel approach to characterization of a low-k dielectric polymer surface
Martin Hoyas, Ana; Schuhmacher, Jorg; Whelan, Caroline; Baklanov, Mikhaïl; Carbonell, Laure; Schaekers, Marc; Celis, Jean-Pierre; Maex, Karen (2002) -
A simplified method for (circular) transmission line model simulation and ultralow contact resistivity extraction
Yu, Hao; Schaekers, Marc; Schram, Tom; Collaert, Nadine; De Meyer, Kristin; Horiguchi, Naoto; Thean, Aaron; Barla, Kathy (2014) -
A snapshot review on metal-semiconductor contact exploration for 7-nm CMOS technology and beyond
Yu, Hao; Schaekers, Marc; Everaert, Jean-Luc; Horiguchi, Naoto; De Meyer, Kristin; Collaert, Nadine (2022-11-21) -
A study of plasma-enhanced CVD growth of Si nanowires catalyzed by indium
Iacopi, Francesca; Vereecken, Philippe; Schaekers, Marc; Caymax, Matty; Detavernier, Christophe; Griffiths, Hefin (2007) -
Advanced capacitor dielectrics: towards 2x nm DRAM
Kim, Min-Soo; Popovici, Mihaela Ioana; Swerts, Johan; Pawlak, Malgorzata; Tomida, Kazuyuki; Kaczer, Ben; Opsomer, Karl; Schaekers, Marc; Tielens, Hilde; Vrancken, Christa; Van Elshocht, Sven; Debusschere, Ingrid; Altimime, Laith; Kittl, Jorge (2011-05) -
Advanced cleaning and ultra-thin oxide technology
Heyns, Marc; Cornelissen, Ingrid; De Gendt, Stefan; Degraeve, Robin; Knotter, D. M.; Mertens, Paul; Mertens, S.; Meuris, Marc; Nigam, Tanya; Rotondaro, Antonio; Schaekers, Marc; Teerlinck, Ivo; Vos, Rita; Wolke, K. (1998) -
Advanced cleaning strategies for ultra-clean silicon surfaces
Heyns, Marc; Bearda, Twan; Cornelissen, Ingrid; De Gendt, Stefan; Loewenstein, Lee; Mertens, Paul; Mertens, Sofie; Meuris, Marc; Schaekers, Marc; Teerlinck, Ivo; Vos, Rita; Wolke, K. (1999) -
Advances in understanding wet cleaning technology and the effect of metal contamination
Heyns, Marc; Bearda, Twan; Cornelissen, Ingrid; De Gendt, Stefan; Loewenstein, Lee; Mertens, Paul; Mertens, S.; Meuris, Marc; Schaekers, Marc; Teerlinck, Ivo; Vos, Rita; Wolke, K. (1999) -
ALD of ZrO2, TiO2 and ZrTiO4 thin films from heteroleptic precursors
Schaekers, Marc; Opsomer, Karl; Rampelberg, Geert; Deduytse, Davy; Detavernier, Christophe; Blasco, Nicolas; Zauner, Andy (2010) -
ALD of ZrO2, TiO2 and ZrTiO4 thin films from novel heteroleptic precursors
Schaekers, Marc; Opsomer, Karl; Deduytsche, Davy; Detavernier, Christophe; Blasco, Nicolas; Zauner, Andy (2008) -
ALD Ru and its applications in DRAM MIM-capacitors and interconnect
Schaekers, Marc; Swerts, Johan; Altimime, Laith; Tokei, Zsolt (2011) -
Alternative catalysts for Si-technology compatible growth of Si nanowires
Iacopi, Francesca; Vereecken, Philippe; Schaekers, Marc; Caymax, Matty; Moelans, Nele; Blanpain, Bart; Detavernier, C.; D'Haen, Jan; Griffiths, Hefin (2007) -
Alternative catalysts for si-technology compatible growth of si nanowires
Iacopi, Francesca; Vereecken, Philippe; Schaekers, Marc; Caymax, Matty; Moelans, Nele; Blanpain, Bart; Detavernier, C.; D'Haen, Jan; Griffiths, Hefin (2007) -
Analysis of trace metals in silicon nitride films by a vapor phase decomposition - solution collection approach
Vereecke, Guy; Schaekers, Marc; Verstraete, Kurt; Arnauts, Sophia; Heyns, Marc; Plante, W. (1999)