Advanced cleaning and ultra-thin oxide technology

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Authors
Heyns, Marc; Cornelissen, Ingrid; De Gendt, Stefan; Degraeve, Robin; Knotter, D. M.; Mertens, Paul; Mertens, S.; Meuris, Marc; Nigam, Tanya; Rotondaro, Antonio; Schaekers, Marc; Teerlinck, Ivo; Vos, Rita; Wolke, K.
Conference
SCP Symposium; 23-24 April 1998; Boise, ID, USA.
Title
Advanced cleaning and ultra-thin oxide technology
Publication type
Oral presentation
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