Publication:

Advanced cleaning and ultra-thin oxide technology

Date

1998
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Author(s)

Heyns, Marc  
;
Cornelissen, Ingrid  
;
De Gendt, Stefan  
;
Degraeve, Robin  
;
Knotter, D. M.
;
Mertens, Paul  
;
Mertens, S.
;
Meuris, Marc  
;
Nigam, Tanya
;
Rotondaro, Antonio
;
Schaekers, Marc  
;
Teerlinck, Ivo
;
Vos, Rita  
;
Wolke, K.

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2107 since deposited on 2021-09-30
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2107 since deposited on 2021-09-30
Acq. date: 2026-02-26

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