Advanced capacitor dielectrics: towards 2x nm DRAM

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Authors
Kim, Min-Soo; Popovici, Mihaela Ioana; Swerts, Johan; Pawlak, Malgorzata; Tomida, Kazuyuki; Kaczer, Ben; Opsomer, Karl; Schaekers, Marc; Tielens, Hilde; Vrancken, Christa; Van Elshocht, Sven; Debusschere, Ingrid; Altimime, Laith; Kittl, Jorge
Conference
3rd International Memory Workshop - IMW
Title
Advanced capacitor dielectrics: towards 2x nm DRAM
Publication type
Proceedings paper
Embargo date
9999-12-31
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