Publication:

Advanced capacitor dielectrics: towards 2x nm DRAM

Date

2011-05

Proceedings Paper

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Files

22508.pdf 320.64 KB

Author(s)

;

Popovici, Mihaela Ioana

;

;

Pawlak, Malgorzata

;

Tomida, Kazuyuki

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;

;

Schaekers, Marc

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;

Vrancken, Christa

;

Van Elshocht, Sven

;

Debusschere, Ingrid

;

Altimime, Laith

;

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