Advanced capacitor dielectrics: towards 2x nm DRAM

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Author(s)

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Popovici, Mihaela Ioana

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Pawlak, Malgorzata

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Tomida, Kazuyuki

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Schaekers, Marc

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Vrancken, Christa

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Van Elshocht, Sven

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Debusschere, Ingrid

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Altimime, Laith

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1935 since deposited on 2021-10-19

Acq. date: 2025-10-23