Publication:

Advanced capacitor dielectrics: towards 2x nm DRAM

Date

2011-05
Proceedings Paper
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dc.contributor.authorKim, Min-Soo
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorSwerts, Johan
dc.contributor.authorPawlak, Malgorzata
dc.contributor.authorTomida, Kazuyuki
dc.contributor.authorKaczer, Ben
dc.contributor.authorOpsomer, Karl
dc.contributor.authorSchaekers, Marc
dc.contributor.authorTielens, Hilde
dc.contributor.authorVrancken, Christa
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorDebusschere, Ingrid
dc.contributor.authorAltimime, Laith
dc.contributor.authorKittl, Jorge
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorTomida, Kazuyuki
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorTielens, Hilde
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorDebusschere, Ingrid
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-19T14:50:41Z
dc.date.available2021-10-19T14:50:41Z
dc.date.embargo9999-12-31
dc.date.issued2011-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19177
dc.source.beginpage42
dc.source.conference3rd International Memory Workshop - IMW
dc.source.conferencedate22/05/2011
dc.source.conferencelocationMonterey, CA USA
dc.source.endpage45
dc.title

Advanced capacitor dielectrics: towards 2x nm DRAM

dc.typeProceedings paper
dspace.entity.typePublication
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