Browsing by author "Sano, K."

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Application of single-wafer wet cleaning prior to epitaxial SiGe process

Sano, K.; Wada, Masayuki; Leys, Frederik; Loo, Roger; Mertens, Paul W.; Snow, James; Izumi, Akira; Miya, Katsuhiko; Eitoku, Atsuro (2008)
Challenges of single-wafer wet cleaning for low temperature pre-epitaxial treatment of SiGe

Sano, K.; Leys, Frederik; Dilliway, Gabriela; Loo, Roger; Mertens, Paul; Snow, J.; Izumi, A.; Eitoku, A. (2008)
Single-wafer wet chemical oxide formation for pre-ALD high-k deposition on 300 mm wafer

Sano, K.; Izumi, A.; Eitoku, A.; Snow, J.; Nyns, Laura; Kubicek, Stefan; Singanamalla, Raghunath; Richard, Olivier; Conard, Thierry; Vos, Rita; Mertens, Paul (2008)