Browsing by author "Pancken, Joris"

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Temporary wafer bonding defect impact assessment on substrate thinning, process enhancement through systematic defect track down

Phommahaxay, Alain; Verbinnen, Greet; Suhard, Samuel; Bex, Pieter; Van den Eede, Axel; Pancken, Joris; Lismont, Mark; Jourdain, Anne; Woitke, Tobias; Bisson, Peter; Spiess, Walter; Swinnen, Bart; Beyer, Gerald; Miller, Andy; Beyne, Eric (2012)
Wafer level characterization of the sacrificial HDP oxide lateral etching by anhydrous vapor HF with ethanol vapor for SiGe MEMS structures

Cui, Hushan; Van Hoof, Rita; Severi, Simone; Witvrouw, Ann; Knoops, An; Delande, Tinne; Pancken, Joris; Claes, Martine (2010)
Wafer level characterization of the sacrificial HDP oxide lateral etching by anhydrous vapor HF with ethanol vapor for SiGe MEMS structures

Cui, Hushan; Van Hoof, Rita; Severi, Simone; Witvrouw, Ann; Knoops, An; Delande, Tinne; Pancken, Joris; Claes, Martine (2010)