Browsing by author "Lukaszewicz, Mikolaj"
Now showing items 1-4 of 4
-
An experimental study of VUV plasma damage on porous organo-silicon glass materials
de Marneffe, Jean-Francois; Lukaszewicz, Mikolaj; Heyne, Markus; Zhang, Liping; Baklanov, Mikhaïl (2013-02) -
Effect of 147 nm radiation on a 2.0 porous organo-Silicon glass
de Marneffe, Jean-Francois; Lukaszewicz, Mikolaj; Porter, Stephen; Zhang, Liping; Heyne, Markus; Baklanov, Mikhaïl (2013) -
Effect of 147nm photons on porous Organo-Silicon Glass materials and damage improvement by optimized Cu/low-k integration approaches
Zhang, Liping; de Marneffe, Jean-Francois; Lukaszewicz, Mikolaj; Barry-Porter, Stephen; Vajda, Felim; Sun, Yiting; Heyne, Markus; Baklanov, Mikhaïl; Rutiqlian, Vito (2014) -
Plasma damage and restoration of a spin-on organic ultra low-k material (k=2.3)
Lukaszewicz, Mikolaj; de Marneffe, Jean-Francois; Wilson, Chris; Zhang, Liping; Peng, Hsing-Ying; Verdonck, Patrick; Baklanov, Mikhaïl (2012)