An experimental study of VUV plasma damage on porous organo-silicon glass materials

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Authors
de Marneffe, Jean-Francois; Lukaszewicz, Mikolaj; Heyne, Markus; Zhang, Liping; Baklanov, Mikhaïl
Conference
SPIE Advanced Lithography Conference: Advanced Etch Technology for Nanopatterning II
Title
An experimental study of VUV plasma damage on porous organo-silicon glass materials
Publication type
Meeting abstract
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