Browsing by author "Bolt, M."
Now showing items 1-4 of 4
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Evaluation of stress reduction in shallow trench isolation CMOS structures via synchrotron X-ray topography, Raman spectroscopy and electrical data
McNally, P. J.; Curley, J. W.; Bolt, M.; Reader, A.; De Wolf, Ingrid; Tuomi, T.; Rantamäki, R.; Danilewski, A. N. (1998) -
Micro-Raman spectroscopy evaluation of the local mechanical stress in shallow trench isolation CMOS structures: correlation with defect generation and diode leakage
De Wolf, Ingrid; Groeseneken, Guido; Maes, Herman; Bolt, M.; Barla, K.; Reader, A.; McNally, P. J. (1998) -
Monitoring of stress reduction in shallow trench isolation CMOS structures via synchrotron x-ray topography, electrical data and Raman spectroscopy
McNally, P. J.; Curley, J. W.; Bolt, M.; Reader, A.; Tuomi, T.; Rantamaki, R.; Danilewsky, A. N.; De Wolf, Ingrid (1999) -
Simulation of mechanical stresses during shallow trench isolation process
Poncet, A.; Bolt, M.; Barla, K.; De Wolf, Ingrid (1998)