Browsing by author "Granneman, Ernst"
Now showing items 1-5 of 5
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Emissivity independent heating of 3D patterns
Vanormelingen, Koen; Granneman, Ernst; Terhorst, Huub; Rosseel, Erik; Verheyden, Kurt (2007) -
First electrical demonstration of DRAM compatible Ni silicides
Machkaoutsan, Vladimir; Bauer, Matthias; Zhang, Y.; Koelling, Sebastian; Franquet, Alexis; Vanormelingen, Koen; Verheyen, Peter; Loo, Roger; Kim, Chul Sung; Lauwers, Anne; Hoffmann, Thomas Y.; Absil, Philippe; Granneman, Ernst; Vandervorst, Wilfried; Thomas, Shawn. G (2009) -
Pattern-dependent heating of 3D structures
Granneman, Ernst; Pages, Xavier; Terhorst, Huub; Verheyden, Kurt; Vanormelingen, Koen; Rosseel, Erik (2007) -
The effect of ramp rate - short process time and partial reactions on Cobalt and Nickel silicide formation
Pagès, Xavier; Van der Jeugd, Kees; Kuznetsov, Vladimir; Granneman, Ernst; Lauwers, Anne; Lindsay, Richard (2004) -
Widening of FUSI RTP process window by spike anneal
Lauwers, Anne; Mertens, Sofie; Absil, Philippe; Chiarella, Thomas; Hoffmann, Thomas; Kubicek, Stefan; de Marneffe, Jean-Francois; Brijs, Bert; Vrancken, Christa; Biesemans, Serge; Kittl, Jorge; Verheyden, Kurt; Vanormelingen, Koen; Granneman, Ernst (2007)