Widening of FUSI RTP process window by spike anneal

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Authors
Lauwers, Anne; Mertens, Sofie; Absil, Philippe; Chiarella, Thomas; Hoffmann, Thomas; Kubicek, Stefan; de Marneffe, Jean-Francois; Brijs, Bert; Vrancken, Christa; Biesemans, Serge; Kittl, Jorge; Verheyden, Kurt; Vanormelingen, Koen; Granneman, Ernst
Conference
15th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP
Title
Widening of FUSI RTP process window by spike anneal
Publication type
Proceedings paper
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