Browsing by author "Dilliway, Gabriela"
Now showing items 1-4 of 4
-
Challenges of single-wafer wet cleaning for low temperature pre-epitaxial treatment of SiGe
Sano, K.; Leys, Frederik; Dilliway, Gabriela; Loo, Roger; Mertens, Paul; Snow, J.; Izumi, A.; Eitoku, A. (2008) -
Doubling or quadrupling MuGFET Fin integration scheme with higher pattern fidelity, lower CD variation and higher layout efficiency
Rooyackers, Rita; Augendre, Emmanuel; Degroote, Bart; Collaert, Nadine; Nackaerts, Axel; Dixit, Abhisek; Vandeweyer, Tom; Pawlak, Bartek; Ercken, Monique; Kunnen, Eddy; Dilliway, Gabriela; Leys, Frederik; Loo, Roger; Jurczak, Gosia; Biesemans, Serge (2007) -
High aspect ratio via metallization for 3D integration using CVD TiN barrier and electrografted Cu seed
Druais, Gael; Dilliway, Gabriela; Fischer, P.; Guidotti, E.; Bureau, C.; Palmans, Roger; Radisic, Alex (2008) -
Optimization of the MuGFET performance on super critical-strained SOI (SC-SSOI)substrates featuring raised source/drain and dual CESL
Collaert, Nadine; Rooyackers, Rita; Dilliway, Gabriela; Iyengar, Vikram; Augendre, Emmanuel; Leys, Frederik; Cayrefourcq, I.; Ghyselen, B.; Loo, Roger; Jurczak, Gosia; Biesemans, Serge (2007)