Browsing by author "Gornev, E."
Now showing items 1-5 of 5
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Adsorption isobars of fluorocarbon compounds for cryogenic plasma etching of low-k dielectrics (in Russian)
Rezvanov, A.; Gutshin, O.; Gornev, E.; Krasnikov, G.; Mogil'nikov, K.; Zhang, Liping; de Marneffe, Jean-Francois; Dussarat, C.; Baklanov, Mikhaïl (2015) -
Adsorption isobars of fluorocarbon compounds selected for cryogenic etching of low-k materials
Rezvanov, A.; Mogilnikov, K.; Gutshin, O.; Gornev, E.; Krasnikov, G.; Zhang, Liping; Dussarrat, C.; de Marneffe, Jean-Francois; Baklanov, Mikhaïl (2015) -
Investigation of plasma damage of low-k dielectrics during cryogenic etching
Rezvanov, A.; Miakonkikh, A.; Vishnevsky, A.; Gutshin, O.; Gornev, E.; Krasnikov, G.; Mogilnikov, K.; Rudenko, K.; Baklanov, Mikhaïl (2015) -
Low-k protection from F radicals and VUV photons using a multilayer pore grafting approach
Zotovich, Alexey; Rezvanov, Askar; Chanson, Romain; Zhang, L.; Hacker, N.; Kurchikov, K.; Klimin, S.; Zyryanov, S. M.; Lopaev, Dimitri; Gornev, E.; Clemente, I.; Miakonkikh, A.; Maslakov, K. (2018) -
Maskless fabrication of high density silicon nan-pin structures with carbon nano clusters acting as mask for subsequent microwave silicon etching
Yanovich, S.; Baklanov, Mikhaïl; Gushchin, O.; Gornev, E.; Danila, A. (2012)