Browsing by author "Wu, Hengpeng"
Now showing items 1-5 of 5
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All track directed self-assembly of block copolymers: process flow and origin of defects
Rincon Delgadillo, Paulina; Gronheid, Roel; Thode, Christopher J.; Wu, Hengpeng; Cao, Yi; Somervell, Mark; Nafus, Kathleen; Nealy, Paul F. (2012) -
Determination of critical parameters for control of directed self-assembly of block copolymers using frequency multiplication
Rincon Delgadillo, Paulina; Gronheid, Roel; Thode, Christopher; Wu, Hengpeng; Cao, Yi; Lin, Guanyang; Somervell, Mark; Nafus, Kathleen; Nealey, Paul (2012) -
Investigation of cross-linking poly(methyl methacrylate) as a guiding material in block copolymer directed self-assembly
Seidel, Robert; Rincon Delgadillo, Paulina; Ramirez-Hernandez, Abelardo; Wu, Hengpeng; Her, Yougnjun; Yin, Jian; Gronheid, Roel; Nealey, Paul; de Pablo, Juan (2014) -
Manufacturability of dense hole arrays with directed self-assembly using the CHIPS flow
Singh, Arjun; Nam, Jaewoo; Lee, Jongsu; Chan, BT; Wu, Hengpeng; Yin, Jian; Cao, Yi; Gronheid, Roel (2016) -
Patterning sub-25nm half-pitch hexagonal arrays of contact holes with chemo-epitaxial DSA guided by ArFi pre-patterns
Singh, Arjun; Chan, BT; Parnell, Doni; Wu, Hengpeng; Lin, Jian; Cao, Yi; Gronheid, Roel (2015)