Authors

Singh, Arjun; Chan, BT; Parnell, Doni; Wu, Hengpeng; Lin, Jian; Cao, Yi; Gronheid, Roel

Conference

Advances in Patterning Materials and Processes XXXII

Title

Patterning sub-25nm half-pitch hexagonal arrays of contact holes with chemo-epitaxial DSA guided by ArFi pre-patterns

Publication type

Proceedings paper

Embargo date

9999-12-31