Browsing by author "Schwitters, Michael"
Now showing items 1-10 of 10
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Composition control and ferroelectric properties of sidewall Sr0.8Bi2.2Ta2O9 in integrated 3-Dimensional ferroelectric capacitors
Goux, Ludovic; Lisoni, Judit; Schwitters, Michael; Paraschiv, Vasile; Maes, D.; Haspeslagh, Luc; Wouters, Dirk; Menou, M.; Turquat, Ch.; Madigou, V.; Muller, Ch.; Zambrano, R. (2005) -
Composition control and ferrolectric properties of sidewalls in three-dimensional SrBi2Ta2O9-based ferroelectric capacitors
Goux, Ludovic; Lisoni, Judit; Schwitters, Michael; Paraschiv, Vasile; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Menou, N.; Turquat, Ch.; Madigou, V.; Muller, Ch.; Zambrano, R. (2005-09) -
Dependency of the properties of SrxBiyTa2O9 thin films on the Sr and Bi stoichiometry
Viapiana, Matteo; Schwitters, Michael; Wouters, Dirk; Maes, Herman; Van der Biest, Omer (2005) -
Excellent reliability properties of 0.81mm2 integrated SBT fecap's with 3-D structure
Goux, Ludovic; Russo, G.; Lisoni, Judit; Schwitters, Michael; Paraschiv, Vasile; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Zambrano, R. (2005) -
Influence of dry-etch patterning of top electrode and SrBi2Ta2O9 on the properties of ferroelectric capacitors
Goux, Ludovic; Paraschiv, Vasile; Lisoni, Judit; Schwitters, Michael; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Casella, P.; Zambrano, R. (2005) -
Integration of ferroelectric SrBi2Ta2O9-based capacitors beyond 0.18 CMOS technology
Johnson, J.; Goux, Ludovic; Schwitters, Michael; Paraschiv, Vasile; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Caputa, Concetta; Casella, C.; Zambrano, R.; Vecchio, Emma; Monchoix, Hervé; Van Autryve, Luc; Lisoni, Judit (2003) -
Integration of ferroelectric SrBi2Ta2O9-based capacitors in 0.35 μm CMOS technology
Lisoni, Judit; Johnson, Jo; Goux, Ludovic; Schwitters, Michael; Paraschiv, Vasile; Maes, David; Haspeslagh, Luc; Caputa, Concetta; Casella, P.; Zambrano, R.; Vecchio, G.; Monchoix, H.; Van Autryve, Luc; Wouters, Dirk (2004) -
Integration of SrBi2Ta2O9 (SBT) based FRAM capacitors: plasma etch issues and solutions
Paraschiv, Vasile; Boullart, Werner; Vanhaelemeersch, Serge; Lisoni, Judit; Schwitters, Michael; Maes, David; Wouters, Dirk; Casella, P.; Zambrano, R.; Vecchio, G.; Van Autryve, Luc (2004) -
MOCVD-SBT thin films for advanced FeRAM: deposition and film formation processes
Wouters, Dirk; Everaert, Jean-Luc; Schwitters, Michael; Johnson, Jo; Vander Meeren, Hans; Monchoix, H.; Mitaut, C.; Van Autryve, L.; Caputa, C.; Zambrano, R. (2003) -
Sidewalls contribution in integrated three-dimensional Sr0.8Bi2.2Ta2O9-based ferroelectric capacitors
Menou, M.; Turquat, Ch.; Madigou, V.; Muller, Ch.; Goux, Ludovic; Lisoni, Judit; Schwitters, Michael; Wouters, Dirk (2005)