Browsing by author "Nielsen, P.F."
Now showing items 1-6 of 6
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Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions
Petersen, D.H.; Lin, R.; Hansen, T.M.; Rosseel, Erik; Vandervorst, Wilfried; Markvardsen, C.; Kjaer, D.; Nielsen, P.F. (2008) -
Electrical resistance measurements of individual nanometer-wide Si fins
Folkersma, Steven; Bogdanowicz, Janusz; Schulze, Andreas; Petersen, D.H.; Hansen, O.; Henrichsen, H.; Nielsen, P.F.; Vandervorst, Wilfried (2017) -
High precision micro-scale Hall effect characterization method using in-line micro four-point probes
Petersen, Dirch; Hansen, Ole; Lin, Rong; Nielsen, P.F.; Clarysse, Trudo; Goossens, Jozefien; Rosseel, Erik; Vandervorst, Wilfried (2008) -
Micro-uniformity during laser anneal: metrology and physics
Vandervorst, Wilfried; Rosseel, Erik; Lin, R.; Petersen, D.H.; Clarysse, Trudo; Goossens, Jozefien; Nielsen, P.F.; Churton, K. (2008) -
On the activation mechanisms of sub-melt laser anneals
Clarysse, Trudo; Bogdanowicz, Janusz; Goossens, Jozefien; Moussa, Alain; Rosseel, Erik; Vandervorst, Wilfried; Petersen, D.H.; Lin, R.; Nielsen, P.F.; Hansen, O.; Defranoux, C.; Vertikov, A.; Gostein, M.; Bennett, N.S.; Cowern, N.E.B.; Faifer, V.N. (2008) -
On the analysis of the activation mechanisms of sub-melt laser anneals
Clarysse, Trudo; Bogdanowicz, Janusz; Goossens, Jozefien; Moussa, Alain; Rosseel, Erik; Vandervorst, Wilfried; Petersen, Dirch; Lin, Rong; Nielsen, P.F.; Hansen, Ole; Merklin, G.; Bennett, N.S.; Cowern, N.E.B. (2008)