Browsing by author "Pargon, Erwine"
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2D and 3D photoresist line roughness characterization
Vaglio Pret, Alessandro; Gronheid, Roel; Kunnen, Eddy; Pargon, Erwine; Luere, Olivier; Bianchi, Davide (2012) -
2D and 3D photoresist line roughness characterization
Vaglio Pret, Alessandro; Kunnen, Eddy; Gronheid, Roel; Pargon, Erwine; Luere, Olivier; Bianchi, Davide (2013) -
Smoothening of 193 immersion resist by 172 nm VUV exposure
Kunnen, Eddy; Vaglio Pret, Alessandro; Luere, Olivier; Azarnouche, Laurent; Pargon, Erwine; Foubert, Philippe; Gronheid, Roel; Shamiryan, Denis; Baklanov, Mikhaïl; Boullart, Werner (2010)