Browsing by author "Devloo-Casier, Kilian"
Now showing items 1-5 of 5
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Improved thermal stability and retention properties of Cu-Te based CBRAM by Ge alloying
Devulder, Wouter; Opsomer, Karl; Rampelberg, Geert; De Schutter, Bob; Devloo-Casier, Kilian; Jurczak, Gosia; Goux, Ludovic; Detavernier, Christophe (2015) -
In situ monitoring of atomic layer deposition in nanoporous thin films using ellipsometric porosimetry
Dendooven, Jolien; Devloo-Casier, Kilian; Levrau, Elisabeth; Van Hove, Robbert; Pulinthanathu Sree, Sreeprasanth; Baklanov, Mikhaïl; Martens, Johan; Detavernier, Christophe (2012) -
Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
Rampelberg, Geert; Devloo-Casier, Kilian; Deduytsche, Davy; Schaekers, Marc; Blasco, Nicolas; Detavernier, Christophe (2013) -
Surface reactions during thermal and plasma-enhanced atomic layer deposition of titanium dioxide films using tetrakis(dimethylamino)titanium
Vandenbroucke, Sofie; Levrau, Elisabeth; Minjauw, Matthias; Solano Minuesa, Eduardo; Van de Kerckhove, Kevin; Devloo-Casier, Kilian; Pulinthanathu Sree, Sreeprasant; Martens, Johan A.; Vos, Rita; Jans, Karolien; Dendooven, Jolien; Vereecken, Philippe; Stakenborg, Tim; Detavernier, Christophe (2019) -
Tuning the pore size of ink-bottle mesopores by atomic layer deposition
Dendooven, Jolien; Goris, Bart; Devloo-Casier, Kilian; Levrau, Elisabeth; Biermans, Ellen; Baklanov, Mikhaïl; Ludwig, Karl; Van Der Voort, Pascal; Bals, Sara; Detavernier, Christophe (2012)