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Surface reactions during thermal and plasma-enhanced atomic layer deposition of titanium dioxide films using tetrakis(dimethylamino)titanium
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1976 since deposited on 2021-10-27
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Acq. date: 2025-10-24
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Views
1976 since deposited on 2021-10-27
424item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations