Authors

Vandenbroucke, Sofie; Levrau, Elisabeth; Minjauw, Matthias; Solano Minuesa, Eduardo; Van de Kerckhove, Kevin; Devloo-Casier, Kilian; Pulinthanathu Sree, Sreeprasant; Martens, Johan A.; Vos, Rita; Jans, Karolien; Dendooven, Jolien; Vereecken, Philippe; Stakenborg, Tim; Detavernier, Christophe

Conference

EuroCVD 22 - Baltic ALD 16

Title

Surface reactions during thermal and plasma-enhanced atomic layer deposition of titanium dioxide films using tetrakis(dimethylamino)titanium

Publication type

Meeting abstract