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Surface reactions during thermal and plasma-enhanced atomic layer deposition of titanium dioxide films using tetrakis(dimethylamino)titanium
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1978 since deposited on 2021-10-27
1last month
Acq. date: 2025-12-11
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Metrics
Views
1978 since deposited on 2021-10-27
1last month
Acq. date: 2025-12-11
Citations