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Surface reactions during thermal and plasma-enhanced atomic layer deposition of titanium dioxide films using tetrakis(dimethylamino)titanium

Date

2019
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dc.contributor.authorVandenbroucke, Sofie
dc.contributor.authorLevrau, Elisabeth
dc.contributor.authorMinjauw, Matthias
dc.contributor.authorSolano Minuesa, Eduardo
dc.contributor.authorVan de Kerckhove, Kevin
dc.contributor.authorDevloo-Casier, Kilian
dc.contributor.authorPulinthanathu Sree, Sreeprasant
dc.contributor.authorMartens, Johan A.
dc.contributor.authorVos, Rita
dc.contributor.authorJans, Karolien
dc.contributor.authorDendooven, Jolien
dc.contributor.authorVereecken, Philippe
dc.contributor.authorStakenborg, Tim
dc.contributor.authorDetavernier, Christophe
dc.contributor.imecauthorVandenbroucke, Sofie
dc.contributor.imecauthorLevrau, Elisabeth
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorJans, Karolien
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.imecauthorStakenborg, Tim
dc.contributor.orcidimecVandenbroucke, Sofie::0000-0002-2831-3696
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.contributor.orcidimecStakenborg, Tim::0000-0001-9878-9078
dc.date.accessioned2021-10-27T21:37:20Z
dc.date.available2021-10-27T21:37:20Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34291
dc.identifier.urlhttp://hdl.handle.net/1854/LU-8625841
dc.source.conferenceEuroCVD 22 - Baltic ALD 16
dc.source.conferencedate24/06/2019
dc.source.conferencelocationLuxembourg Luxembourg
dc.title

Surface reactions during thermal and plasma-enhanced atomic layer deposition of titanium dioxide films using tetrakis(dimethylamino)titanium

dc.typeMeeting abstract
dspace.entity.typePublication
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